Nanosensors powered by piezoelectric nanogenerators
21 April 2010
By combining a new generation of piezoelectric nanogenerators
with two types of nanowire sensors, researchers at the Georgia Institute
of Technology have created what are believed to be the first
self-powered nanometer-scale sensing devices that draw power from the
conversion of mechanical energy.
The new devices can measure the pH of liquids or detect the presence
of ultraviolet light using electrical current produced from
mechanical energy in the environment.
Based on arrays containing as many as 20,000 zinc oxide nanowires
in each nanogenerator, the devices can produce up to 1.2 volts of
output voltage, and are fabricated with a chemical process designed
to facilitate low-cost manufacture on flexible substrates. Tests
done with nearly one thousand nanogenerators — which have no
mechanical moving parts — showed that they can be operated over time
without loss of generating capacity.
Details of the improved nanogenerator and self-powered
nanosensors were scheduled to be reported March 28 in the journal
Nature Nanotechnology. The research was supported by the National
Science Foundation, the Defense Advanced Research Projects Agency,
and the U.S. Department of Energy.
“We have demonstrated a robust way to harvest energy and use it
for powering nanometer-scale sensors,” said Zhong Lin Wang, a
Regents professor in the School of Materials Science and Engineering
at the Georgia Institute of Technology. “We now have a technology
roadmap for scaling these nanogenerators up to make truly practical
applications.”
For the past five years, Wang’s research team has been developing
nanoscale generators that use the piezoelectric effect — which
produces electrical charges when wires made from zinc oxide are
subjected to strain. The strain can be produced by simply flexing
the wires, and current from many wires can be constructively
combined to power small devices. The research effort has recently
focused on increasing the amount of current and voltage generated
and on making the devices more robust.
In the paper, Wang and collaborators report on a new
configuration for the nanowires that embeds both ends of the tiny
structures in a polymer substrate. The wires can then generate
current as they are compressed in a flexible nanogenerator
enclosure, eliminating the contact with a metallic electrode that
was required in earlier devices. Because the generators are
completely enclosed, they can be used in a variety of environments.
“We can now grow the wires chemically on substrates that are
foldable and flexible and the processing can now be done at
substrate temperatures of less than 100 degrees Celsius — about the
temperature of coffee,” explained Wang. “That will allow lower cost
fabrication and growth on just about any substrate.”

Figure shows (a) Fabrication of a vertical-nanowire
integrated nanogenerator (VING), (b) Design of a lateral-nannowire
integrated nanogenerator (LING) array, (c) Scanning electron
microscope image of a row of laterally-grown zinc oxide nanowire
arrays, and (d) Image of the LING structure.

Packaged nanogenerators that use 700 rows of
lateral nanowire arrays (left) and packaged nanogenerators that use
vertically-aligned nanowire arrays (right).
The nanogenerators are produced using a multi-step process that
includes fabrication of electrodes that provide both Ohmic and
Shottky contacts for the nanowires. The arrays can be grown both
vertically and laterally. To maximize current and voltage, the
growth and assembly requires alignment of crystalline growth, as
well as the synchronization of charging and discharging cycles.
Production of vertical nanogenerators begins with growing zinc
oxide nanowires on a gold-coated surface using a wet chemical
method. A layer of polymethyl-methacrylate is then spun-coated onto
the nanowires, covering them from top to bottom. Oxygen plasma
etching is then performed, leaving clean tips on which a piece of
silicon wafer coated with platinum is placed. The coated silicon
provides a Shottky barrier, which is essential for maintaining
electrical current flow.
The alternating current output of the nanogenerators depends on
the amount of strain applied. “At a strain rate of less than two
percent per second, we can produce output voltage of 1.2 volts,”
said Wang. “The power output is matched with the external load.”
Lateral nanogenerators integrating 700 rows of zinc oxide
nanowires produced a peak voltage of 1.26 volts at a strain of 0.19
percent. In a separate nanogenerator, vertical integration of three
layers of zinc oxide nanowire arrays produced a peak power density
of 2.7 milliwatts per cubic centimeter.
Wang’s team has so far produced two tiny sensors that are based
on zinc oxide nanowires and powered by the nanogenerators. By
measuring the amplitude of voltage changes across the device when
exposed to different liquids, the pH sensor can measure the acidity
of liquids. An ultraviolet nanosensor depends on similar voltage
changes to detect when it is struck by ultraviolet light.
In addition to Wang, the team authoring the paper included Sheng
Xu, Yong Qin, Chen Xu, Yaguang Wei, and Rusen Wang, all from Georgia
Tech’s School of Materials Science and Engineering.
The new generator and nanoscale sensors open new possibilities
for very small sensing devices that can operate without batteries,
powered by mechanical energy harvested from the environment. Energy
sources could include the motion of tides, sonic waves, mechanical
vibration, the flapping of a flag in the wind, pressure from shoes
of a hiker or the movement of clothing.
“Building devices that are small isn’t sufficient,” Wang noted.
“We must also be able to power them in a sustainable way that allows
them to be mobile. Using our new nanogenerator, we can put these
devices into the environment where they can work independently and
sustainably without requiring a battery.”