Agilent and Stanford University to build breakthrough sub 10 nanometre scale devices

12 November 2009

Agilent Technologies Inc. (NYSE: A)  is collaborating with Stanford University to use novel nanotechnology techniques to build a new class of nanoscale devices.

The research will use a combination of the scanning probe microscope (SPM) and atomic layer deposition (ALD) to enable the rapid prototyping and characterization of devices with breakthroughs in sub 10 nm scale for a wide range of applications.

“The novel nanostructures will be fabricated and characterized in-situ in this unique SPM-ALD tool in order to rapidly prototype a wide variety of next-generation devices,” said Fritz Prinz, professor and chairman, mechanical engineering, Stanford University.

“The SPM-ALD tool will enable us to build devices which take advantage of the quantum confinement effects present at small length scales — length scales that could not be accessed with traditional lithography methods. These devices can only be built with manufacturing tools possessing extraordinary spatial resolution.”

This program focuses on the integration of ALD, a thin-film technique capable of sub-nanometre precision in thickness, with the nanometre lateral resolution SPM in a drive to extend the capability of scanning probe techniques to prototyping and device fabrication.

Historically, performance of electronic devices has been limited by traditional manufacturing methods, such as optical and electron beam lithography, which are not likely to deliver feature resolution significantly below 20 nm.

However, the quantum mechanical effects of electron confinement in devices 10 nm or smaller result in phenomena qualitatively different than those seen in larger devices. Taking advantage of this quantum confinement is predicted to result in a new paradigm for electronic devices.

“We chose Stanford University for this grant for the recognized expertise of professor Prinz and team, and the close alignment between the proposed research and the future of Agilent’s SPM business,” said Jack Wenstrand, Agilent’s director of university relations.

The work between Agilent and Stanford University is part of Agilent’s University Relations Program, which facilitates collaborations with universities around the world. Agilent supports scientific work with universities worldwide through direct grants and collaborative research.


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